Acoustic meta-materials in MEMS BAW resonators

View/open

22422.pdf (1.743Mb)

Metadata

Show full item record

Authors

Rottenberg, Xavier; Jansen, Roelof; Van Hoof, Chris; Tilmans, Harrie

ISSN

0947-8396

Issue

3

Journal

Applied Physics A: Materials Science and Processing

Volume

103

Title

Acoustic meta-materials in MEMS BAW resonators

Publication type

Journal article

Embargo date

9999-12-31

Collections

Articles