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Acoustic meta-materials in MEMS BAW resonators

dc.contributor.authorRottenberg, Xavier
dc.contributor.authorJansen, Roelof
dc.contributor.authorVan Hoof, Chris
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-19T18:18:42Z
dc.date.available2021-10-19T18:18:42Z
dc.date.issued2011
dc.identifier.issn0947-8396
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19711
dc.sourceIIOimport
dc.titleAcoustic meta-materials in MEMS BAW resonators
dc.typeJournal article
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorJansen, Roelof
dc.contributor.imecauthorVan Hoof, Chris
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecJansen, Roelof::0000-0001-6685-4699
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage869
dc.source.endpage875
dc.source.journalApplied Physics A: Materials Science and Processing
dc.source.issue3
dc.source.volume103
imec.availabilityPublished - open access


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