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Saturation of front propagation in a reaction-diffusion process describing plasma damage in porous low-k materials

dc.contributor.authorSafaverdi, Soghra
dc.contributor.authorBarkema, Gerard
dc.contributor.authorKunnen, Eddy
dc.contributor.authorUrbanowicz, Adam
dc.contributor.authorMaes, Christian
dc.date.accessioned2021-10-19T18:21:33Z
dc.date.available2021-10-19T18:21:33Z
dc.date.issued2011
dc.identifier.issn1098-0121
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19718
dc.sourceIIOimport
dc.titleSaturation of front propagation in a reaction-diffusion process describing plasma damage in porous low-k materials
dc.typeJournal article
dc.source.peerreviewyes
dc.source.beginpage245320
dc.source.journalPhysical Review B
dc.source.issue24
dc.source.volume83
imec.availabilityPublished - imec


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