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Saturation of front propagation in a reaction-diffusion process describing plasma damage in porous low-k materials
Publication:
Saturation of front propagation in a reaction-diffusion process describing plasma damage in porous low-k materials
Date
2011
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Safaverdi, Soghra
;
Barkema, Gerard
;
Kunnen, Eddy
;
Urbanowicz, Adam
;
Maes, Christian
Journal
Physical Review B
Abstract
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1886
since deposited on 2021-10-19
Acq. date: 2025-10-26
Citations
Metrics
Views
1886
since deposited on 2021-10-19
Acq. date: 2025-10-26
Citations