Publication:
Saturation of front propagation in a reaction-diffusion process describing plasma damage in porous low-k materials
Date
| dc.contributor.author | Safaverdi, Soghra | |
| dc.contributor.author | Barkema, Gerard | |
| dc.contributor.author | Kunnen, Eddy | |
| dc.contributor.author | Urbanowicz, Adam | |
| dc.contributor.author | Maes, Christian | |
| dc.date.accessioned | 2021-10-19T18:21:33Z | |
| dc.date.available | 2021-10-19T18:21:33Z | |
| dc.date.issued | 2011 | |
| dc.identifier.issn | 1098-0121 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/19718 | |
| dc.source.beginpage | 245320 | |
| dc.source.issue | 24 | |
| dc.source.journal | Physical Review B | |
| dc.source.volume | 83 | |
| dc.title | Saturation of front propagation in a reaction-diffusion process describing plasma damage in porous low-k materials | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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