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Planar Langmuir probe in pulsing regime

dc.contributor.authorSamara, Vladimir
dc.contributor.authorBooth, Jean-Paul
dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.authorBoullart, Werner
dc.date.accessioned2021-10-19T18:22:48Z
dc.date.available2021-10-19T18:22:48Z
dc.date.issued2011-05
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19721
dc.sourceIIOimport
dc.titlePlanar Langmuir probe in pulsing regime
dc.typeMeeting abstract
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.contributor.imecauthorBoullart, Werner
dc.contributor.orcidimecBoullart, Werner::0000-0001-7614-2097
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conference4th International Workshop on Plasma Etch and Strip in Microelectronics - PESM
dc.source.conferencedate5/05/2011
dc.source.conferencelocationMechelen Belgium
dc.identifier.urlhttp://www.pesm2011.be/Pesm2011/online_presentations_5may.html
imec.availabilityPublished - open access


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