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A silicon-controlled rectifier-based ESD protection for MEMS – Merits and challenges

dc.contributor.authorSangameswaran, Sandeep
dc.contributor.authorThijs, Steven
dc.contributor.authorScholz, Mirko
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorLinten, Dimitri
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-19T18:24:29Z
dc.date.available2021-10-19T18:24:29Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19725
dc.sourceIIOimport
dc.titleA silicon-controlled rectifier-based ESD protection for MEMS – Merits and challenges
dc.typeProceedings paper
dc.contributor.imecauthorThijs, Steven
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorLinten, Dimitri
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecThijs, Steven::0000-0003-2889-8345
dc.contributor.orcidimecLinten, Dimitri::0000-0001-8434-1838
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.contributor.orcidimecDe Coster, Jeroen::0000-0002-4893-0691
dc.contributor.orcidimecGroeseneken, Guido::0000-0003-3763-2098
dc.source.peerreviewyes
dc.source.conference33rd Annual EOS/ESD Symposium
dc.source.conferencedate11/09/2011
dc.source.conferencelocationAnaheim, CA USA
imec.availabilityPublished - imec


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