dc.contributor.author | Kubicek, Stefan | |
dc.contributor.author | Biesemans, Serge | |
dc.contributor.author | De Meyer, Kristin | |
dc.date.accessioned | 2021-09-30T08:34:34Z | |
dc.date.available | 2021-09-30T08:34:34Z | |
dc.date.issued | 1997 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/1973 | |
dc.source | IIOimport | |
dc.title | Investigation of the effect of the extension implant energy on deep submicron CMOS device perfomance | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Kubicek, Stefan | |
dc.contributor.imecauthor | Biesemans, Serge | |
dc.contributor.imecauthor | De Meyer, Kristin | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 392 | |
dc.source.endpage | 395 | |
dc.source.conference | ESSDERC '97: Proceedings of the 27th European Solid-State Device Research Conference | |
dc.source.conferencedate | 22/09/1997 | |
dc.source.conferencelocation | Stuttgart Germany | |
imec.availability | Published - open access | |