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SiGe MEMS process design kit for MEMS-IC design
Publication:
SiGe MEMS process design kit for MEMS-IC design
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Date
2011
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Schröpfer, Gerold
;
Lorenz, Gunar
;
Donnay, Stephane
;
Rottenberg, Xavier
;
Jansen, Roelof
;
Bienstman, Jan
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1878
since deposited on 2021-10-19
3
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Acq. date: 2025-12-16
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Metrics
Views
1878
since deposited on 2021-10-19
3
last month
Acq. date: 2025-12-16
Citations