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Three-dimensional electrical characterization of carbon nanotube-based interconnects at the nanometer-scale

dc.contributor.authorSchulze, Andreas
dc.contributor.authorHantschel, Thomas
dc.contributor.authorDate, Lucien
dc.contributor.authorChiodarelli, Nicolo
dc.contributor.authorEyben, Pierre
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-19T18:35:21Z
dc.date.available2021-10-19T18:35:21Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19750
dc.sourceIIOimport
dc.titleThree-dimensional electrical characterization of carbon nanotube-based interconnects at the nanometer-scale
dc.typeOral presentation
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorDate, Lucien
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.source.peerreviewno
dc.source.conference22nd European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, and Nitrides - DIAMOND
dc.source.conferencedate4/09/2011
dc.source.conferencelocationGarmisch-Partenkirchen Germany
imec.availabilityPublished - imec


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