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Electrical characterization of carbon nanotube based interconnects

dc.contributor.authorSchulze, Andreas
dc.contributor.authorHantschel, Thomas
dc.contributor.authorEyben, Pierre
dc.contributor.authorDathe, Andre
dc.contributor.authorNazir, Aftab
dc.contributor.authorMody, Jay
dc.contributor.authorCelano, Umberto
dc.contributor.authorKe, Xiaoxing
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-19T18:36:16Z
dc.date.available2021-10-19T18:36:16Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19752
dc.sourceIIOimport
dc.titleElectrical characterization of carbon nanotube based interconnects
dc.typeProceedings paper
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorNazir, Aftab
dc.contributor.imecauthorCelano, Umberto
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.contributor.orcidimecCelano, Umberto::0000-0002-2856-3847
dc.source.peerreviewno
dc.source.conferenceBeNeLux SPM User meeting
dc.source.conferencedate9/11/2011
dc.source.conferencelocationTwente The Netherlands
imec.availabilityPublished - imec


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