Influence of pulse duration in picosecond laser ablation of silicon nitride layers
dc.contributor.author | Schulz-Ruhtenberg, Malte | |
dc.contributor.author | Trusheim, Daniel | |
dc.contributor.author | Das, Jo | |
dc.contributor.author | Krantz, Stephan | |
dc.contributor.author | Wieduwilt, Jan | |
dc.date.accessioned | 2021-10-19T18:37:13Z | |
dc.date.available | 2021-10-19T18:37:13Z | |
dc.date.issued | 2011 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/19754 | |
dc.source | IIOimport | |
dc.title | Influence of pulse duration in picosecond laser ablation of silicon nitride layers | |
dc.type | Proceedings paper | |
dc.source.peerreview | no | |
dc.source.beginpage | 614 | |
dc.source.endpage | 619 | |
dc.source.conference | Proceedings of the Silicon PV conference (1st International Conference on Crystalline Silicon Photovoltaics) | |
dc.source.conferencedate | 17/04/2011 | |
dc.source.conferencelocation | Freiburg Germany | |
imec.availability | Published - imec | |
imec.internalnotes | Energy Procedia Vol. 8(2011) |
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