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Selective removal of high-k dielectrics

dc.contributor.authorShamiryan, Denis
dc.contributor.authorParaschiv, Vasile
dc.date.accessioned2021-10-19T18:41:13Z
dc.date.available2021-10-19T18:41:13Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19763
dc.sourceIIOimport
dc.titleSelective removal of high-k dielectrics
dc.typeProceedings paper
dc.contributor.imecauthorParaschiv, Vasile
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage311
dc.source.endpage318
dc.source.conferenceChina Semiconductor Technology International Conference - CSTIC
dc.source.conferencedate13/03/2011
dc.source.conferencelocationShanghai China
imec.availabilityPublished - open access
imec.internalnotesECS Transactions; Vol. 34, issue 1


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