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Growth and processing defects in CMOS homo- and hetero-epitaxy
Publication:
Growth and processing defects in CMOS homo- and hetero-epitaxy
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Date
2011
Proceedings Paper
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21812.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Simoen, Eddy
;
Bargallo Gonzalez, Mireia
;
Eneman, Geert
;
Rosseel, Erik
;
Hikavyy, Andriy
;
Kobayashi, Daisuke
;
Loo, Roger
;
Caymax, Matty
;
Claeys, Cor
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Acq. date: 2025-12-10
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1952
since deposited on 2021-10-19
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Acq. date: 2025-12-10
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Downloads
1
since deposited on 2021-10-19
Acq. date: 2025-12-10
Views
1952
since deposited on 2021-10-19
1
last month
Acq. date: 2025-12-10
Citations