A deep level transient spectroscopy comparison of the SiO2/Si and Al2O3/Si interface states

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Authors
Simoen, Eddy; Rothschild, Aude; Vermang, Bart; Poortmans, Jef; Mertens, Robert
Conference
220th ECS Fall Meeting
Title
A deep level transient spectroscopy comparison of the SiO2/Si and Al2O3/Si interface states
Publication type
Meeting abstract
Embargo date
9999-12-31
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