Authors

Spieth, Swen; Brett, O.; Seidl, K.; Aarts, Arno; Erismis, Mehmet Akif; Herwik, S.; Trenkle, F.; Tatzner, S.; Auber, J.; Daub, M.; Pereira Neves, Hercules; Puers, Bob; Paul, O.; Ruther, P.; Zengerle, R

ISSN

0960-1317

Issue

12

Journal

Journal of Micromechanics and Microengineering

Volume

21

Title

A floating 3D silicon microprobe array for neural drug delivery compatible with electrical recording

Publication type

Journal article