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A floating 3D silicon microprobe array for neural drug delivery compatible with electrical recording

dc.contributor.authorSpieth, Swen
dc.contributor.authorBrett, O.
dc.contributor.authorSeidl, K.
dc.contributor.authorAarts, Arno
dc.contributor.authorErismis, Mehmet Akif
dc.contributor.authorHerwik, S.
dc.contributor.authorTrenkle, F.
dc.contributor.authorTatzner, S.
dc.contributor.authorAuber, J.
dc.contributor.authorDaub, M.
dc.contributor.authorPereira Neves, Hercules
dc.contributor.authorPuers, Bob
dc.contributor.authorPaul, O.
dc.contributor.authorRuther, P.
dc.contributor.authorZengerle, R
dc.date.accessioned2021-10-19T19:07:34Z
dc.date.available2021-10-19T19:07:34Z
dc.date.issued2011
dc.identifier.issn0960-1317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19819
dc.sourceIIOimport
dc.titleA floating 3D silicon microprobe array for neural drug delivery compatible with electrical recording
dc.typeJournal article
dc.contributor.imecauthorAarts, Arno
dc.contributor.imecauthorPuers, Bob
dc.source.peerreviewyes
dc.source.beginpage125001
dc.source.journalJournal of Micromechanics and Microengineering
dc.source.issue12
dc.source.volume21
imec.availabilityPublished - imec


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