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Opportunities and challenges for 3D system integration

dc.contributor.authorSwinnen, Bart
dc.date.accessioned2021-10-19T19:25:51Z
dc.date.available2021-10-19T19:25:51Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19857
dc.sourceIIOimport
dc.titleOpportunities and challenges for 3D system integration
dc.typeProceedings paper
dc.contributor.imecauthorSwinnen, Bart
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceInternational Conference on Materials for Advanced Technologies - ICMAT
dc.source.conferencedate26/06/2011
dc.source.conferencelocationSingapore
imec.availabilityPublished - open access
imec.internalnotesICMAT11-A-4131 (Symposium V)


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