Progress on 3D silicon integration
dc.contributor.author | Swinnen, Bart | |
dc.date.accessioned | 2021-10-19T19:26:37Z | |
dc.date.available | 2021-10-19T19:26:37Z | |
dc.date.issued | 2011 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/19859 | |
dc.source | IIOimport | |
dc.title | Progress on 3D silicon integration | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Swinnen, Bart | |
dc.source.peerreview | no | |
dc.source.conference | Leaping from lag to Production Manufacturing in 3D Packaging | |
dc.source.conferencedate | 6/12/2011 | |
dc.source.conferencelocation | Tokyo Japan | |
imec.availability | Published - imec |
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