dc.contributor.author | Teugels, Lieve | |
dc.contributor.author | Heylen, Nancy | |
dc.contributor.author | Leunissen, Peter | |
dc.date.accessioned | 2021-10-19T19:35:57Z | |
dc.date.available | 2021-10-19T19:35:57Z | |
dc.date.issued | 2011 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/19879 | |
dc.source | IIOimport | |
dc.title | An overview of some recent CMP projects at imec | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Teugels, Lieve | |
dc.contributor.imecauthor | Heylen, Nancy | |
dc.contributor.orcidimec | Teugels, Lieve::0000-0002-6613-9414 | |
dc.source.peerreview | no | |
dc.source.conference | Clarkson University Seminar | |
dc.source.conferencedate | 11/08/2011 | |
dc.source.conferencelocation | Potsdam, NY USA | |
imec.availability | Published - imec | |