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1Xnm copper and low-k reliability

dc.contributor.authorTokei, Zsolt
dc.contributor.authorCroes, Kristof
dc.date.accessioned2021-10-19T19:42:34Z
dc.date.available2021-10-19T19:42:34Z
dc.date.issued2011-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19894
dc.sourceIIOimport
dc.title1Xnm copper and low-k reliability
dc.typeProceedings paper
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorCroes, Kristof
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.source.peerreviewno
dc.source.beginpage777
dc.source.endpage778
dc.source.conferenceInternational Conference on Solid State Devices and Materials - SSDM
dc.source.conferencedate28/09/2011
dc.source.conferencelocationNagoya Japan
imec.availabilityPublished - imec


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