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Dry etch challenges for implantable silicon-based semi-flexible neural probe fabrication
Publication:
Dry etch challenges for implantable silicon-based semi-flexible neural probe fabrication
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Date
2011
Presentation
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Tutunjyan, Nina
;
Andrei, Alexandru
;
Verbinnen, Greet
;
Slabbekoorn, John
;
Eberle, Wolfgang
;
Baier, Ulrich
;
Boullart, Werner
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1968
since deposited on 2021-10-19
2
last month
Acq. date: 2025-12-17
Citations
Metrics
Views
1968
since deposited on 2021-10-19
2
last month
Acq. date: 2025-12-17
Citations