dc.contributor.author | Urbanowicz, Adam | |
dc.contributor.author | Vanstreels, Kris | |
dc.contributor.author | Verdonck, Patrick | |
dc.contributor.author | Van Besien, Els | |
dc.contributor.author | Trompoukis, Christos | |
dc.contributor.author | Shamiryan, Denis | |
dc.contributor.author | De Gendt, Stefan | |
dc.contributor.author | Baklanov, Mikhaïl | |
dc.date.accessioned | 2021-10-19T20:00:22Z | |
dc.date.available | 2021-10-19T20:00:22Z | |
dc.date.issued | 2011 | |
dc.identifier.issn | 1071-1023 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/19929 | |
dc.source | IIOimport | |
dc.title | Effect of UV wavelength on the hardening process of porogen-containing and porogen-free ultra-low-k PECVD dielectrics | |
dc.type | Journal article | |
dc.contributor.imecauthor | Vanstreels, Kris | |
dc.contributor.imecauthor | Verdonck, Patrick | |
dc.contributor.imecauthor | Van Besien, Els | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.orcidimec | Vanstreels, Kris::0000-0002-4420-0966 | |
dc.contributor.orcidimec | Verdonck, Patrick::0000-0003-2454-0602 | |
dc.contributor.orcidimec | Van Besien, Els::0000-0002-5174-2229 | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 32201 | |
dc.source.journal | Journal of Vacuum Science and Technology B | |
dc.source.issue | 3 | |
dc.source.volume | 29 | |
imec.availability | Published - imec | |