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Effect of UV wavelength on the hardening process of porogen-containing and porogen-free ultra-low-k PECVD dielectrics

dc.contributor.authorUrbanowicz, Adam
dc.contributor.authorVanstreels, Kris
dc.contributor.authorVerdonck, Patrick
dc.contributor.authorVan Besien, Els
dc.contributor.authorTrompoukis, Christos
dc.contributor.authorShamiryan, Denis
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-19T20:00:22Z
dc.date.available2021-10-19T20:00:22Z
dc.date.issued2011
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19929
dc.sourceIIOimport
dc.titleEffect of UV wavelength on the hardening process of porogen-containing and porogen-free ultra-low-k PECVD dielectrics
dc.typeJournal article
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.imecauthorVan Besien, Els
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.contributor.orcidimecVan Besien, Els::0000-0002-5174-2229
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewyes
dc.source.beginpage32201
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue3
dc.source.volume29
imec.availabilityPublished - imec


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