Authors

Urbanowicz, Adam; Vanstreels, Kris; Verdonck, Patrick; Van Besien, Els; Trompoukis, Christos; Shamiryan, Denis; De Gendt, Stefan; Baklanov, Mikhaïl

ISSN

1071-1023

Issue

3

Journal

Journal of Vacuum Science and Technology B

Volume

29

Title

Effect of UV wavelength on the hardening process of porogen-containing and porogen-free ultra-low-k PECVD dielectrics

Publication type

Journal article