Effect of UV wavelength on the hardening process of porogen-containing and porogen-free ultra-low-k PECVD dielectrics

dc.contributor.author	Urbanowicz, Adam
dc.contributor.author	Vanstreels, Kris
dc.contributor.author	Verdonck, Patrick
dc.contributor.author	Van Besien, Els
dc.contributor.author	Trompoukis, Christos
dc.contributor.author	Shamiryan, Denis
dc.contributor.author	De Gendt, Stefan
dc.contributor.author	Baklanov, Mikhaïl
dc.contributor.imecauthor	Vanstreels, Kris
dc.contributor.imecauthor	Verdonck, Patrick
dc.contributor.imecauthor	Van Besien, Els
dc.contributor.imecauthor	De Gendt, Stefan
dc.contributor.orcidimec	Vanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimec	Verdonck, Patrick::0000-0003-2454-0602
dc.contributor.orcidimec	Van Besien, Els::0000-0002-5174-2229
dc.contributor.orcidimec	De Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned	2021-10-19T20:00:22Z
dc.date.available	2021-10-19T20:00:22Z
dc.date.issued	2011
dc.identifier.issn	1071-1023
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/19929
dc.source.beginpage	32201
dc.source.issue	3
dc.source.journal	Journal of Vacuum Science and Technology B
dc.source.volume	29
dc.title	Effect of UV wavelength on the hardening process of porogen-containing and porogen-free ultra-low-k PECVD dielectrics
dc.type	Journal article
dspace.entity.type	Publication
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