Mask absorber roughness impact in extreme ultraviolet lithography

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Authors

Vaglio Pret, Alessandro; Gronheid, Roel; Graves, Trey; Smith, Mark D.; Biafore, John

ISSN

1537-1646

Issue

2

Journal

Journal of Micro/Nanolithography MEMS and MOEMS

Volume

10

Title

Mask absorber roughness impact in extreme ultraviolet lithography

Publication type

Journal article

Embargo date

9999-12-31

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