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Scalability investigation of 3D SONOS NAND Flash by experiment and simulation

dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorArreghini, Antonio
dc.contributor.authorKar, Gouri Sankar
dc.contributor.authorMaconi, Alessandro
dc.contributor.authorVan Houdt, Jan
dc.date.accessioned2021-10-19T20:12:05Z
dc.date.available2021-10-19T20:12:05Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19954
dc.sourceIIOimport
dc.titleScalability investigation of 3D SONOS NAND Flash by experiment and simulation
dc.typeProceedings paper
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorArreghini, Antonio
dc.contributor.imecauthorKar, Gouri Sankar
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecArreghini, Antonio::0000-0002-7493-9681
dc.contributor.orcidimecVan Houdt, Jan::0000-0003-1381-6925
dc.source.peerreviewyes
dc.source.conferenceSemiconductor Interface Specialists Conference - SISC
dc.source.conferencedate1/12/2011
dc.source.conferencelocationArlington, VA USA
imec.availabilityPublished - imec


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