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Highly scaled vertical cylindrical SONOS cell with bi-layer poly-silicon channel for 3D NAND flash memory

dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorKar, Gouri Sankar
dc.contributor.authorBlomme, Pieter
dc.contributor.authorArreghini, Antonio
dc.contributor.authorCacciato, Antonio
dc.contributor.authorBreuil, Laurent
dc.contributor.authorDe Keersgieter, An
dc.contributor.authorParaschiv, Vasile
dc.contributor.authorVrancken, Christa
dc.contributor.authorDouhard, Bastien
dc.contributor.authorRichard, Olivier
dc.contributor.authorVan Aerde, Steven
dc.contributor.authorDebusschere, Ingrid
dc.contributor.authorVan Houdt, Jan
dc.date.accessioned2021-10-19T20:12:42Z
dc.date.available2021-10-19T20:12:42Z
dc.date.issued2011
dc.identifier.issn0741-3106
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19955
dc.sourceIIOimport
dc.titleHighly scaled vertical cylindrical SONOS cell with bi-layer poly-silicon channel for 3D NAND flash memory
dc.typeJournal article
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorKar, Gouri Sankar
dc.contributor.imecauthorBlomme, Pieter
dc.contributor.imecauthorArreghini, Antonio
dc.contributor.imecauthorBreuil, Laurent
dc.contributor.imecauthorDe Keersgieter, An
dc.contributor.imecauthorParaschiv, Vasile
dc.contributor.imecauthorVrancken, Christa
dc.contributor.imecauthorDouhard, Bastien
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorVan Aerde, Steven
dc.contributor.imecauthorDebusschere, Ingrid
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecArreghini, Antonio::0000-0002-7493-9681
dc.contributor.orcidimecBreuil, Laurent::0000-0003-2869-1651
dc.contributor.orcidimecDe Keersgieter, An::0000-0002-5527-8582
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecVan Houdt, Jan::0000-0003-1381-6925
dc.source.peerreviewyes
dc.source.beginpage1501
dc.source.endpage1503
dc.source.journalIEEE Electron Device Letters
dc.source.issue11
dc.source.volume32
imec.availabilityPublished - imec


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