Authors

Van den Bosch, Geert; Kar, Gouri Sankar; Blomme, Pieter; Arreghini, Antonio; Cacciato, Antonio; Breuil, Laurent; De Keersgieter, An; Paraschiv, Vasile; Vrancken, Christa; Douhard, Bastien; Richard, Olivier; Van Aerde, Steven; Debusschere, Ingrid; Van Houdt, Jan

ISSN

0741-3106

Issue

11

Journal

IEEE Electron Device Letters

Volume

32

Title

Highly scaled vertical cylindrical SONOS cell with bi-layer poly-silicon channel for 3D NAND flash memory

Publication type

Journal article