Highly scaled vertical cylindrical SONOS cell with bi-layer poly-silicon channel for 3D NAND flash memory

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Author(s)

Van den Bosch, Geert

;

Kar, Gouri Sankar

;

;

Arreghini, Antonio

;

Cacciato, Antonio

;

Breuil, Laurent

;

De Keersgieter, An

;

Paraschiv, Vasile

;

Vrancken, Christa

;

Douhard, Bastien

;

Richard, Olivier

;

Van Aerde, Steven

;

Debusschere, Ingrid

;

Journal

IEEE Electron Device Letters

Metrics

1984 since deposited on 2021-10-19

Acq. date: 2025-10-24