Publication:

Highly scaled vertical cylindrical SONOS cell with bi-layer poly-silicon channel for 3D NAND flash memory

Date

2011
Journal article
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Author(s)

Van den Bosch, Geert  
;
Kar, Gouri Sankar  
;
Blomme, Pieter  
;
Arreghini, Antonio  
;
Cacciato, Antonio
;
Breuil, Laurent  
;
De Keersgieter, An  
;
Paraschiv, Vasile  
;
Vrancken, Christa  
;
Douhard, Bastien  
;
Richard, Olivier  
;
Van Aerde, Steven  
;
Debusschere, Ingrid  
;
Van Houdt, Jan  

Journal

IEEE Electron Device Letters

Abstract

Description

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