Publication:
Highly scaled vertical cylindrical SONOS cell with bi-layer poly-silicon channel for 3D NAND flash memory
Date
| dc.contributor.author | Van den Bosch, Geert | |
| dc.contributor.author | Kar, Gouri Sankar | |
| dc.contributor.author | Blomme, Pieter | |
| dc.contributor.author | Arreghini, Antonio | |
| dc.contributor.author | Cacciato, Antonio | |
| dc.contributor.author | Breuil, Laurent | |
| dc.contributor.author | De Keersgieter, An | |
| dc.contributor.author | Paraschiv, Vasile | |
| dc.contributor.author | Vrancken, Christa | |
| dc.contributor.author | Douhard, Bastien | |
| dc.contributor.author | Richard, Olivier | |
| dc.contributor.author | Van Aerde, Steven | |
| dc.contributor.author | Debusschere, Ingrid | |
| dc.contributor.author | Van Houdt, Jan | |
| dc.contributor.imecauthor | Van den Bosch, Geert | |
| dc.contributor.imecauthor | Kar, Gouri Sankar | |
| dc.contributor.imecauthor | Blomme, Pieter | |
| dc.contributor.imecauthor | Arreghini, Antonio | |
| dc.contributor.imecauthor | Breuil, Laurent | |
| dc.contributor.imecauthor | De Keersgieter, An | |
| dc.contributor.imecauthor | Paraschiv, Vasile | |
| dc.contributor.imecauthor | Vrancken, Christa | |
| dc.contributor.imecauthor | Douhard, Bastien | |
| dc.contributor.imecauthor | Richard, Olivier | |
| dc.contributor.imecauthor | Van Aerde, Steven | |
| dc.contributor.imecauthor | Debusschere, Ingrid | |
| dc.contributor.imecauthor | Van Houdt, Jan | |
| dc.contributor.orcidimec | Van den Bosch, Geert::0000-0001-9971-6954 | |
| dc.contributor.orcidimec | Arreghini, Antonio::0000-0002-7493-9681 | |
| dc.contributor.orcidimec | Breuil, Laurent::0000-0003-2869-1651 | |
| dc.contributor.orcidimec | De Keersgieter, An::0000-0002-5527-8582 | |
| dc.contributor.orcidimec | Richard, Olivier::0000-0002-3994-8021 | |
| dc.contributor.orcidimec | Van Houdt, Jan::0000-0003-1381-6925 | |
| dc.date.accessioned | 2021-10-19T20:12:42Z | |
| dc.date.available | 2021-10-19T20:12:42Z | |
| dc.date.issued | 2011 | |
| dc.identifier.issn | 0741-3106 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/19955 | |
| dc.source.beginpage | 1501 | |
| dc.source.endpage | 1503 | |
| dc.source.issue | 11 | |
| dc.source.journal | IEEE Electron Device Letters | |
| dc.source.volume | 32 | |
| dc.title | Highly scaled vertical cylindrical SONOS cell with bi-layer poly-silicon channel for 3D NAND flash memory | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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