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Carbon nanotube interconnects: electrical characterization of CNT contacts with Cu damascene top contact

dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorVereecke, Bart
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorCott, Daire
dc.contributor.authorMasahito, Sugiura
dc.contributor.authorYusaku, Kashiwagi
dc.contributor.authorTeugels, Lieve
dc.contributor.authorCaluwaerts, Rudy
dc.contributor.authorBeyer, Gerald
dc.contributor.authorHeyns, Marc
dc.contributor.authorTokei, Zsolt
dc.contributor.authorDe Gendt, Stefan
dc.date.accessioned2021-10-19T20:17:37Z
dc.date.available2021-10-19T20:17:37Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19966
dc.sourceIIOimport
dc.titleCarbon nanotube interconnects: electrical characterization of CNT contacts with Cu damascene top contact
dc.typeOral presentation
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorVereecke, Bart
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.imecauthorCott, Daire
dc.contributor.imecauthorTeugels, Lieve
dc.contributor.imecauthorCaluwaerts, Rudy
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.contributor.orcidimecTeugels, Lieve::0000-0002-6613-9414
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewno
dc.source.conferenceWorkshop on Graphene and Carbon Nanotubes
dc.source.conferencedate23/09/2011
dc.source.conferencelocationLeuven Belgium
imec.availabilityPublished - imec


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