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Material and process sensitivities of high-k materials

dc.contributor.authorVan Elshocht, Sven
dc.date.accessioned2021-10-19T20:19:21Z
dc.date.available2021-10-19T20:19:21Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19970
dc.sourceIIOimport
dc.titleMaterial and process sensitivities of high-k materials
dc.typeOral presentation
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.source.peerreviewno
dc.source.conferenceEnhance Winter-School
dc.source.conferencedate25/01/2011
dc.source.conferencelocationBochum Germany
dc.identifier.urlwww.enhance-itn.eu
imec.availabilityPublished - imec


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