Enabling poly- SiGe MEMS scaling by improving anchor strength and resistance

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Authors

Van Hoof, Rita; Bryce, George; Claes, Gert; Witvrouw, Ann; Severi, Simone

ISSN

0167-9317

Issue

8

Journal

Microelectronic Engineering

Volume

88

Title

Enabling poly- SiGe MEMS scaling by improving anchor strength and resistance

Publication type

Journal article

Embargo date

9999-12-31

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Articles