Show simple item record

Enabling poly- SiGe MEMS scaling by improving anchor strength and resistance

dc.contributor.authorVan Hoof, Rita
dc.contributor.authorBryce, George
dc.contributor.authorClaes, Gert
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorSeveri, Simone
dc.date.accessioned2021-10-19T20:25:12Z
dc.date.available2021-10-19T20:25:12Z
dc.date.issued2011
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19982
dc.sourceIIOimport
dc.titleEnabling poly- SiGe MEMS scaling by improving anchor strength and resistance
dc.typeJournal article
dc.contributor.imecauthorVan Hoof, Rita
dc.contributor.imecauthorBryce, George
dc.contributor.imecauthorSeveri, Simone
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage2420
dc.source.endpage2423
dc.source.journalMicroelectronic Engineering
dc.source.issue8
dc.source.volume88
dc.identifier.urlhttp://ees.elsevier.com/mee/
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
21473.pdf
Size:
537.8Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record