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Probing 3D-semiconductors structures

dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-19T20:38:09Z
dc.date.available2021-10-19T20:38:09Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20009
dc.sourceIIOimport
dc.titleProbing 3D-semiconductors structures
dc.typeMeeting abstract
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpageAS-TuA10
dc.source.conferenceAVS 58th Annual International Symposium and Exhibition
dc.source.conferencedate6/11/2011
dc.source.conferencelocationKnoxville, TN USA
imec.availabilityPublished - open access


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