Metrology at imec : a center of excellence enabling fundamental understanding of process and materials development

dc.contributor.author	Vandervorst, Wilfried
dc.date.accessioned	2021-10-19T20:38:34Z
dc.date.available	2021-10-19T20:38:34Z
dc.date.issued	2011
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/20010
dc.source	IIOimport
dc.title	Metrology at imec : a center of excellence enabling fundamental understanding of process and materials development
dc.type	Oral presentation
dc.contributor.imecauthor	Vandervorst, Wilfried
dc.date.embargo	9999-12-31
dc.source.peerreview	no
dc.source.conference	International Conference on Frontiers of Characterization and Metrology for Nanoelectronics
dc.source.conferencedate	23/05/2011
dc.source.conferencelocation	Grenoble France
imec.availability	Published - open access