Imec : a centre of excellence enabling fundamental understanding of process and materials development
dc.contributor.author | Vandervorst, Wilfried | |
dc.date.accessioned | 2021-10-19T20:38:58Z | |
dc.date.available | 2021-10-19T20:38:58Z | |
dc.date.issued | 2011 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20011 | |
dc.source | IIOimport | |
dc.title | Imec : a centre of excellence enabling fundamental understanding of process and materials development | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.conference | International Symposium Plasma Technology | |
dc.source.conferencedate | 9/02/2011 | |
dc.source.conferencelocation | Nagoya Japan | |
imec.availability | Published - open access |