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Sims depth profiling with sub-nm resolution (?)

dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorDouhard, Bastien
dc.contributor.authorDelmotte, Joris
dc.contributor.authorVincent, Benjamin
dc.date.accessioned2021-10-19T20:40:23Z
dc.date.available2021-10-19T20:40:23Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20014
dc.sourceIIOimport
dc.titleSims depth profiling with sub-nm resolution (?)
dc.typeMeeting abstract
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorDouhard, Bastien
dc.contributor.imecauthorVincent, Benjamin
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage37
dc.source.endpage40
dc.source.conferenceInternational Workshop on High Resolution Depth Profiling - HRDP6
dc.source.conferencedate27/06/2011
dc.source.conferencelocationParis France
imec.availabilityPublished - open access
imec.internalnotesI8


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