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Stimulated buried dielectric phase formation for nanelectronic aims

dc.contributor.authorLitovchenko, V. G.
dc.contributor.authorRomanyuk, B. N.
dc.contributor.authorEfremov, A. A.
dc.contributor.authorMel'nik, V. P.
dc.contributor.authorClaeys, Cor
dc.date.accessioned2021-09-30T09:17:19Z
dc.date.available2021-09-30T09:17:19Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2001
dc.sourceIIOimport
dc.titleStimulated buried dielectric phase formation for nanelectronic aims
dc.typeProceedings paper
dc.source.peerreviewno
dc.source.beginpage81
dc.source.endpage85
dc.source.conferenceProceedings of the 8th International Symposium on Silicon-on-Insulator Technology and Devices
dc.source.conferencedate31/08/1997
dc.source.conferencelocationParis France
imec.availabilityPublished - imec
imec.internalnotesECS Proceedings; Vol. 97-23


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