Germanium doping for improved silicon substrates and devices

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Authors

Vanhellemont, J.; Chen, J.; Lauwaert, J.; Vrielinck, H.; Xu, W.; Yang, D.; Rafi, J.M.; Ohyama, H.; Simoen, Eddy

ISSN

0022-0248

Issue

1

Journal

Journal of Crystal Growth

Volume

317

Title

Germanium doping for improved silicon substrates and devices

Publication type

Journal article

Embargo date

9999-12-31

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