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Study of ALD on porous low-k

dc.contributor.authorVerdonck, Patrick
dc.date.accessioned2021-10-19T20:56:56Z
dc.date.available2021-10-19T20:56:56Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20049
dc.sourceIIOimport
dc.titleStudy of ALD on porous low-k
dc.typeOral presentation
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.source.peerreviewno
dc.source.conferenceMetryx seminar at IITC
dc.source.conferencedate10/05/2011
dc.source.conferencelocationDresden Germany
imec.availabilityPublished - imec
imec.internalnotesAn informal, mass oriented talk


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