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Fabrication of a micro-lens array for Reflective Electron Beam Lithography

dc.contributor.authorVereecke, Bart
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorLazzarino, Frederic
dc.contributor.authorMiller, Andy
dc.contributor.authorKellens, Kristof
dc.contributor.authorDekkers, Harold
dc.contributor.authorFreed, Regina
dc.contributor.authorGrella, L.
dc.date.accessioned2021-10-19T20:59:35Z
dc.date.available2021-10-19T20:59:35Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20054
dc.sourceIIOimport
dc.titleFabrication of a micro-lens array for Reflective Electron Beam Lithography
dc.typeProceedings paper
dc.contributor.imecauthorVereecke, Bart
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.imecauthorLazzarino, Frederic
dc.contributor.imecauthorMiller, Andy
dc.contributor.imecauthorKellens, Kristof
dc.contributor.imecauthorDekkers, Harold
dc.contributor.orcidimecLazzarino, Frederic::0000-0001-7961-9727
dc.contributor.orcidimecDekkers, Harold::0000-0003-4778-5709
dc.source.peerreviewno
dc.source.conferenceInternational Conference on Solid State Devices and Materials - SSDM
dc.source.conferencedate28/09/2011
dc.source.conferencelocationNagoya Japan
imec.availabilityPublished - imec


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