dc.contributor.author | Vereecke, Bart | |
dc.contributor.author | Haspeslagh, Luc | |
dc.contributor.author | Lazzarino, Frederic | |
dc.contributor.author | Miller, Andy | |
dc.contributor.author | Kellens, Kristof | |
dc.contributor.author | Dekkers, Harold | |
dc.contributor.author | Freed, Regina | |
dc.contributor.author | Grella, L. | |
dc.date.accessioned | 2021-10-19T20:59:35Z | |
dc.date.available | 2021-10-19T20:59:35Z | |
dc.date.issued | 2011 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20054 | |
dc.source | IIOimport | |
dc.title | Fabrication of a micro-lens array for Reflective Electron Beam Lithography | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Vereecke, Bart | |
dc.contributor.imecauthor | Haspeslagh, Luc | |
dc.contributor.imecauthor | Lazzarino, Frederic | |
dc.contributor.imecauthor | Miller, Andy | |
dc.contributor.imecauthor | Kellens, Kristof | |
dc.contributor.imecauthor | Dekkers, Harold | |
dc.contributor.orcidimec | Lazzarino, Frederic::0000-0001-7961-9727 | |
dc.contributor.orcidimec | Dekkers, Harold::0000-0003-4778-5709 | |
dc.source.peerreview | no | |
dc.source.conference | International Conference on Solid State Devices and Materials - SSDM | |
dc.source.conferencedate | 28/09/2011 | |
dc.source.conferencelocation | Nagoya Japan | |
imec.availability | Published - imec | |