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RTS diagnostics of source-drain (edge?) related defects in submicron n-MOSFETs

dc.contributor.authorLukyanchikova, N.
dc.contributor.authorPetrichuk, M. V.
dc.contributor.authorGarbar, N.
dc.contributor.authorSimoen, Eddy
dc.contributor.authorClaeys, Cor
dc.date.accessioned2021-09-30T09:17:26Z
dc.date.available2021-09-30T09:17:26Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2005
dc.sourceIIOimport
dc.titleRTS diagnostics of source-drain (edge?) related defects in submicron n-MOSFETs
dc.typeProceedings paper
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage368
dc.source.endpage371
dc.source.conferenceESSDERC '97: Proceedings of the 27th European Solid-State Device Research Conference
dc.source.conferencedate22/09/1997
dc.source.conferencelocationStuttgart Germany
imec.availabilityPublished - open access


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