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Double trouble or double your fun: double patterning and variability

dc.contributor.authorVerkest, Diederik
dc.date.accessioned2021-10-19T21:04:45Z
dc.date.available2021-10-19T21:04:45Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20064
dc.sourceIIOimport
dc.titleDouble trouble or double your fun: double patterning and variability
dc.typeOral presentation
dc.contributor.imecauthorVerkest, Diederik
dc.contributor.orcidimecVerkest, Diederik::0000-0001-6567-2746
dc.source.peerreviewno
dc.source.conferenceDesign Automation Conference
dc.source.conferencedate7/06/2011
dc.source.conferencelocationSan Diego, CA USA
imec.availabilityPublished - imec


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