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Compositional characterization of nickel silicides by HAADF-STEM imaging

dc.contributor.authorVerleysen, Eveline
dc.contributor.authorBender, Hugo
dc.contributor.authorRichard, Olivier
dc.contributor.authorSchryvers, Nick
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-19T21:06:40Z
dc.date.available2021-10-19T21:06:40Z
dc.date.issued2011
dc.identifier.issn0022-2461
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20068
dc.sourceIIOimport
dc.titleCompositional characterization of nickel silicides by HAADF-STEM imaging
dc.typeJournal article
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.identifier.doi10.1007/s10853-010-5191-z
dc.source.peerreviewyes
dc.source.beginpage2001
dc.source.endpage2008
dc.source.journalJournal of Materials Science
dc.source.issue7
dc.source.volume46
imec.availabilityPublished - imec


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