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Experimental determination of inelastic mean free paths for calculation of TEM specimen thickness

dc.contributor.authorVerleysen, Eveline
dc.contributor.authorBender, Hugo
dc.contributor.authorSchryvers, Dominique
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-19T21:07:08Z
dc.date.available2021-10-19T21:07:08Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20069
dc.sourceIIOimport
dc.titleExperimental determination of inelastic mean free paths for calculation of TEM specimen thickness
dc.typeMeeting abstract
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpageTU-28
dc.source.conferenceInternational Conference on Frontiers of Characterization and Metrology for Nanoelectronics
dc.source.conferencedate23/05/2011
dc.source.conferencelocationGrenoble France
imec.availabilityPublished - open access


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