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Patterning of Ag using a RIE process

dc.contributor.authorVicca, Peter
dc.contributor.authorSmout, Steve
dc.contributor.authorSteudel, Soeren
dc.contributor.authorGenoe, Jan
dc.contributor.authorSchutze, Falk
dc.contributor.authorFehse, Karsten
dc.contributor.authorHeremans, Paul
dc.date.accessioned2021-10-19T21:16:22Z
dc.date.available2021-10-19T21:16:22Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20087
dc.sourceIIOimport
dc.titlePatterning of Ag using a RIE process
dc.typeOral presentation
dc.contributor.imecauthorSmout, Steve
dc.contributor.imecauthorGenoe, Jan
dc.contributor.imecauthorHeremans, Paul
dc.contributor.orcidimecSmout, Steve::0000-0001-5464-8951
dc.contributor.orcidimecGenoe, Jan::0000-0002-4019-5979
dc.contributor.orcidimecHeremans, Paul::0000-0003-2151-1718
dc.source.peerreviewno
dc.source.conferenceFlexible Electronics and Displays Conference - Flex
dc.source.conferencedate7/02/2011
dc.source.conferencelocationPhoenix, AZ USA
imec.availabilityPublished - imec
imec.internalnotes


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