dc.contributor.author | Vicca, Peter | |
dc.contributor.author | Smout, Steve | |
dc.contributor.author | Steudel, Soeren | |
dc.contributor.author | Genoe, Jan | |
dc.contributor.author | Schutze, Falk | |
dc.contributor.author | Fehse, Karsten | |
dc.contributor.author | Heremans, Paul | |
dc.date.accessioned | 2021-10-19T21:16:22Z | |
dc.date.available | 2021-10-19T21:16:22Z | |
dc.date.issued | 2011 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20087 | |
dc.source | IIOimport | |
dc.title | Patterning of Ag using a RIE process | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Smout, Steve | |
dc.contributor.imecauthor | Genoe, Jan | |
dc.contributor.imecauthor | Heremans, Paul | |
dc.contributor.orcidimec | Smout, Steve::0000-0001-5464-8951 | |
dc.contributor.orcidimec | Genoe, Jan::0000-0002-4019-5979 | |
dc.contributor.orcidimec | Heremans, Paul::0000-0003-2151-1718 | |
dc.source.peerreview | no | |
dc.source.conference | Flexible Electronics and Displays Conference - Flex | |
dc.source.conferencedate | 7/02/2011 | |
dc.source.conferencelocation | Phoenix, AZ USA | |
imec.availability | Published - imec | |
imec.internalnotes | | |