Ge chemical vapor deposition on GaAs for low resistivity contacts

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Authors

Vincent, Benjamin; Firrincieli, Andrea; Wang, Wei-E; Waldron, Niamh; Franquet, Alexis; Douhard, Bastien; Vandervorst, Wilfried; Clarysse, Trudo; Brammertz, Guy; Loo, Roger; Dekoster, Johan; Meuris, Marc; Caymax, Matty

ISSN

0013-4651

Issue

3

Journal

Journal of the Electrochemical Society

Volume

158

Title

Ge chemical vapor deposition on GaAs for low resistivity contacts

Publication type

Journal article

Embargo date

9999-12-31

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