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Silicon nano-pillar test structures for quantitative evaluation of wafer drying induced pattern collapse

dc.contributor.authorVos, Ingrid
dc.contributor.authorHellin, David
dc.contributor.authorVertommen, Johan
dc.contributor.authorBoullart, Werner
dc.date.accessioned2021-10-19T21:32:03Z
dc.date.available2021-10-19T21:32:03Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20116
dc.sourceIIOimport
dc.titleSilicon nano-pillar test structures for quantitative evaluation of wafer drying induced pattern collapse
dc.typeMeeting abstract
dc.contributor.imecauthorVos, Ingrid
dc.contributor.imecauthorHellin, David
dc.contributor.imecauthorBoullart, Werner
dc.contributor.orcidimecBoullart, Werner::0000-0001-7614-2097
dc.source.peerreviewno
dc.source.beginpage2042
dc.source.conferenceECS Fall Meeting
dc.source.conferencedate9/10/2011
dc.source.conferencelocationBoston, MA USA
imec.availabilityPublished - imec


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